Pressure effect on a tandem hollow cathode discharge in argon
نویسندگان
چکیده
منابع مشابه
P1-25: CW Microwave Radiation Source from Micro-Hollow Cathode Plasma Discharge
A continuous-wave microwave radiation source is under investigation using Micro-Hollow Cathode Discharge (MHCD) technology. Arrays of grooves, 50 microns in diameter and ~3 mm long have been fabricated to contain the plasma discharge. Argon discharge in the resonance cavity has been observed at atmospheric pressure. The turn-on voltage was observed to be 400V (383μA). Lowering the voltage to 31...
متن کاملA novel diagnostic for time-resolved spectroscopic argon and lithium density measurements
A new diagnostic technique for determining neutral gas and metal vapor densities over a wide pressure range with high time resolution is described. A compact, current-stabilized hollow cathode/anode discharge is use to ionize the gas and/or trace impurity to be analyzed. We report proof-of-principle operation of the diagnostic in a well characterized argon discharge in the pressure range 6.7–26...
متن کاملThe excitation structure in a micro-hollow cathode discharge in the normal regime at medium argon pressure
A microplasma is generated in the microhole (400 μm diameter) of a molybdenum-aluminamolybdenum sandwich (MHCD type) at medium pressure (30-200 Torr) in pure argon. Imaging and emission spectroscopy have been used to study the light emission mechanisms in the microdischarge. We find that emission intensities of both argon atom and argon ion lines present sharp peaks located near the cathode, an...
متن کاملCharacterization of hollow cathode and parallel plate microplasmas: scaling and breakdown
We present an experimental comparison of parallel plate and hollow cathode microplasma structures, operated at high pressure with narrow anode–cathode gaps. A moveable anode arrangement with ±12μm spatial resolution was used to vary the electrode separation to cover the pd range between 0.01 and 4 Torr cm for both structures. The hollow cathode discharge was operated with pressure–diameter (pD)...
متن کاملHollow cathode sustained plasma microjets: Characterization and application to diamond deposition
Extending the principle of operation of hollow cathode microdischarges to a tube geometry has allowed the formation of stable, high-pressure plasma microjets in a variety of gases including Ar, He, and H2 . Direct current discharges are ignited between stainless steel capillary tubes (d 5178 mm) which are operated as the cathode and a metal grid or plate that serves as the anode. Argon plasma m...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2017